A two-port piezoelectric micromachined ultrasonic transducer

Author

Sammoura, Firas ; Shelton, Stefon ; Akhbari, Sina ; Horsley, David ; Liwei Lin

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Masdar Inst. of Sci. & Technol., Abu Dhabi, United Arab Emirates

fYear

2014

fDate

12-16 May 2014

Firstpage

1

Lastpage

4

Abstract

A two-port piezoelectric micromachined ultrasound transducer (pMUT) has been demonstrated using aluminum nitride (AlN) as the piezoelectric material with good linearity, high acoustic pressure per unit input voltage, and enhanced electromechanical coupling factor. Experimental data are found to match well with values predicted by the theoretical models. The magnitude of the second harmonic of a two-port pMUT is characterized as 485% lower than that of a conventional one-port pMUT.

Keywords

aluminium compounds; micromachining; piezoelectric materials; piezoelectric transducers; ultrasonic transducers; AlN; aluminum nitride; electromechanical coupling factor; piezoelectric material; second harmonic magnitude; two-port pMUT; two-port piezoelectric micromachined ultrasonic transducer; Acoustics; Electrodes; Harmonic analysis; III-V semiconductor materials; Transducers; Ultrasonic imaging; Ultrasonic transducers; acoutic pressure; electromechanical coupling factor; harmonic imaging; linearity; pMUT; piezoelectric micromachined ultrasonic transducer; two-port;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, International Workshop on Acoustic Transduction Materials and Devices & Workshop on Piezoresponse Force Microscopy (ISAF/IWATMD/PFM), 2014 Joint IEEE International Symposium on the

Conference_Location

State College, PA

Type

conf

DOI

10.1109/ISAF.2014.6923004

Filename

6923004