DocumentCode
1192108
Title
Pressure and temperature microsensor based on surface acoustic wave
Author
Li, T.-L. ; Wu, Zhisheng ; Hu, Haibo ; Zheng, Lei
Author_Institution
Shenzhen Grad. Sch., Univ. Town of Shenzhen, Shenzhen
Volume
45
Issue
6
fYear
2009
Firstpage
337
Lastpage
338
Abstract
A novel microsensor based on a surface acoustic wave is reported, which is to measure pressure and temperature simultaneously. The kernel structure and design theory of this sensor with a single sensing unit are introduced. The excellent agreement between the pressure and temperature results measured by the sensor and the direct measurement data is presented.
Keywords
microsensors; pressure sensors; surface acoustic wave sensors; temperature sensors; design theory; kernel structure; pressure microsensor; surface acoustic wave sensor; temperature microsensor;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2009.3129
Filename
4800402
Link To Document