DocumentCode

1192467

Title

Monolithic RD MEMS inductor using silicon MEMS foundry process

Author

Li, Luoqing ; Uttamchandani, Deepak

Volume

1

Issue

1

fYear

2006

fDate

7/1/2006 12:00:00 AM

Firstpage

5

Lastpage

8

fLanguage

English

Journal_Title

Micro & Nano Letters, IET

Publisher

iet

ISSN

1750-0443

Type

jour

Filename

1687688