Protein-Mediated Nanocrystal Assembly for Flash Memory Fabrication

Author

Tang, Shan ; Mao, Chuanbin ; Liu, Yueran ; Kelly, David Q. ; Banerjee, Sanjay K.

Author_Institution

Microelectron. Res. Center, Texas Univ., Austin, TX

Volume

54

Issue

3

fYear

2007

fDate

3/1/2007 12:00:00 AM

Firstpage

433

Lastpage

438

Abstract

For the first time, we demonstrate that a chaperonin protein lattice can be used as a template to assemble nanocrystal (NC) arrays for Flash memory fabrication. This provides a new approach that can incorporate different types of NCs from a colloidal suspension for Flash memory fabrication. Lead selenide and cobalt NC assemblies achieved through this method have a high density of 9.5times10¹¹/cm ² and 1.6times10¹²/cm², respectively, as well as good distribution uniformity. Devices exhibit promising Flash memory functions, with a flatband shift of 0.5 under 8-V operation, endurance >10⁵ cycles, and retention time >10⁴ s

Keywords

cobalt; flash memories; lead compounds; nanostructured materials; nanotechnology; Co; Hatband shift; PbSe; chaperonin protein lattice; flash memory fabrication; nanocrystal array template; protein nanocrystal assembly; Assembly; Chemical vapor deposition; EPROM; Fabrication; Flash memory; Nanocrystals; Nanopatterning; Nonvolatile memory; Proteins; Size control; Chaperonin protein template; Flash memory; nanocrystal (NC);

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2006.890234

Filename

4114860