Hybrid MOEMS tunable filter for interrogation of fiber Bragg grating sensors

Author

Unamuno, Anartz ; Uttamchandani, Deepak

Author_Institution

Microsystems Group, Univ. of Strathclyde, Glasgow, UK

Volume

17

Issue

1

fYear

2005

Firstpage

202

Lastpage

204

Abstract

Experimental evaluation and performance results of a tunable optical filter based on hybrid microoptoelectromechanical systems technology are described in this letter. The hybrid optical microsystem is built using an off-the-shelf 200-GHz dense wavelength-division-multiplexing interference filter and a rotary microelectromechanical systems platform, suspended and actuated by an array of thermal microactuators fabricated through a commercially available process (SOIMUMPs). Results show a tuning range of over 870 pm, which satisfies the demodulation requirements for fiber Bragg grating sensors.

Keywords

Bragg gratings; demodulation; fibre optic sensors; interference filters; micro-optics; microactuators; optical arrays; optical tuning; wavelength division multiplexing; 200 GHz; SOIMUMP; demodulation; dense wavelength-division-multiplexing interference filter; fiber Bragg grating sensors; hybrid MOEMS tunable filter; rotary microoptoelectromechanical systems platform; thermal microactuators array; Bragg gratings; Fiber gratings; Laser tuning; Optical attenuators; Optical filters; Optical refraction; Optical sensors; Optical variables control; Tunable circuits and devices; Wavelength division multiplexing; Fiber Bragg grating (FBG); microactuators; microoptoelectromechanical systems (MOEMS); microsystems;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.837746

Filename

1372630