• DocumentCode
    1194111
  • Title

    Oxygen Effects on a \\hbox {He/O}_{2} Plasma Jet at Atmospheric Pressure

  • Author

    Wang, Shouguo ; Wan, Jun

  • Author_Institution
    Inst. of Microelectron., Chinese Acad. of Sci., Beijing
  • Volume
    37
  • Issue
    4
  • fYear
    2009
  • fDate
    4/1/2009 12:00:00 AM
  • Firstpage
    551
  • Lastpage
    554
  • Abstract
    A plasma jet has been developed that operates using RF power and produces a stable homogeneous discharge of He/O2 at atmospheric pressure. An optical emission spectroscopy technique was used to observe the electronically excited species at the point 10 mm downstream from the nozzle generated by the He/O2 plasma jet, and the discharge characteristics for the gas mixture of He/O2 were studied with a current probe and a voltage probe. The results indicate that there is a relative optimum fraction of O2 in the He/O2 gas mixture from 0.5% to 1.5% for the relative larger intensity of the characteristic atomic oxygen line at 777 nm, the root-mean-square (rms) current and rms voltage of the discharge are also more sensitive to oxygen content than to total gas flow.
  • Keywords
    discharges (electric); helium; nozzles; oxygen; plasma diagnostics; plasma jets; plasma probes; He-O2; RF power; atmospheric pressure; current probe; electronically excited species; gas mixture; nozzle; optical emission spectroscopy; oxygen Effects; plasma jet; pressure 1 atm; stable homogeneous discharge; total gas flow; voltage probe; wavelength 777 nm; Atmospheric pressure; discharge characteristics; oxygen effect; plasma jet;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2009.2012861
  • Filename
    4801628