Silicon microstructures and microactuators for compact computer disk drives

Advances in VLSI and software technology have been the primary engines for the ongoing information revolution. But the steady stream of technical innovations in magnetic disk recording technology are also important factors contributing to the economic strengths of the computer and information industry. One important technology trend for the disk drive industry has been that of miniaturization. As this trend continues, future disk drives will have the same form factor as VLSIs, storing gigabytes of data. Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo-controlled microelectromechanical components for future super-compact disk drives. At UCLA and Caltech, for the past two years (1992-94) we have initiated a number of industry-supported joint research projects to develop microstructures and microactuators for future generation super compact magnetic recording rigid disk drives, including one to design and fabricate silicon read/write head microsuspensions with integrated electrical and mechanical interconnects, which target the next generation 30% form factor pico-sliders, and one for electromagnetic piggyback microactuators in super high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques.<>