Composite microbolometers with tellurium detector elements

Author

Wentworth, Stuart M. ; Neikirk, Dean P.

Author_Institution

Dept. of Electr. Eng., Auburn Univ., AL, USA

Volume

40

Issue

2

fYear

1992

fDate

2/1/1992 12:00:00 AM

Firstpage

196

Lastpage

201

Abstract

A composite microbolometer has been constructed for possible use as a broadband submillimeter radiation detector. Theory, fabrication, and measurement of these devices are discussed, and a finite element thermal model is introduced. The devices utilize nichrome load elements which can be impedance-matched to a planar antenna. The load elements are thermally coupled to tellurium detectors. Room temperature responsivities of 120 V/W and noise equivalent powers (NEPs) as low as 6.7×10^-9 W/√Hz were achieved. Performance appears to be limited by 1/f noise in the Te detector

Keywords

bolometers; chromium alloys; electron device noise; finite element analysis; microwave detectors; nickel alloys; tellurium; 1/f noise; NEPs; Ni-Cr load elements; Te detector; broadband submillimeter radiation detector; composite microbolometer; fabrication; finite element thermal model; impedance matching; noise equivalent powers; planar antenna; responsivities; thermal coupling; Bismuth; Bolometers; Detectors; Fabrication; Finite impulse response filter; Impedance; Resistors; Tellurium; Temperature sensors; Thermal resistance;

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/22.120090

Filename

120090