• DocumentCode
    1209778
  • Title

    2006 International Conference on Simulation of Semiconductor Process and Devices

  • Volume
    18
  • Issue
    4
  • fYear
    2005
  • Firstpage
    722
  • Lastpage
    722
  • Abstract
    Provides notice of upcoming conference events of interest to practitioners and researchers.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2005.860918
  • Filename
    1528589