DocumentCode
1211608
Title
2007 Best Paper Award
Author
Boning, Duane
Volume
21
Issue
2
fYear
2008
fDate
5/1/2008 12:00:00 AM
Firstpage
129
Lastpage
130
Abstract
The 2007 IEEE Transactions on Semiconductor Manufacturing Best Paper Award is presented to Qiaolin (Charlie) Zhang, Kameshwar Poolla, and Costas J. Spanos for their paper, "Across Wafer Critical Dimension Uniformity Enhancement Through Lithography and Etch Process Sequences: Concept, Approach, Modeling, and Experiment," which appeared in the November issue.
Keywords
Awards;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2008.2000481
Filename
4512052
Link To Document