Two axial shearing force measurement device with a micro displacement sensor

We propose a promising biaxial shearing force measurement device with an integrated micro displacement sensor (chip size of 3 mm by 3 mm and 0.7 mm in thickness) housed in an external trapezoidal metallic frame. Applying shearing force on the surface of the frame, the tilts occur on the ceiling of the frame. We can measure that tilts as a shearing force by micro displacement sensor and we obtained a linear signal response to applied biaxial shearing force. The range and sensitivity of the sensor depends on the material or thickness of the frame, therefore we can apply the sensor to various possible applications by changing its shape.