DocumentCode
121314
Title
Shield effect of floating electrode for power efficient micro-plasma VUV light source
Author
Sato, Ryota ; Yasumatsu, Daisuke ; Kumagai, Shinya ; Hori, Muneo ; Sasaki, Motoharu
Author_Institution
Toyota Technol. Inst., Toyota, Japan
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
145
Lastpage
146
Abstract
MEMS plasma source for VUV light source is improved. The floating electrode has been introduced for the power efficient discharging. Shielding the major part of that electrode is found to be further effective for saving the power. The ignition and sustaining powers are 5 and 4.5W, respectively. They are lower than the value for ICP type micro-plasma reported including the bulk setup.
Keywords
electrodes; ignition; micromechanical devices; plasma sources; shielding; ultraviolet sources; ICP type microplasma; MEMS plasma source; floating electrode; ignition; power 4.5 W to 5 W; power efficient discharging; power efficient microplasma VUV light source; shield effect; Coils; Electrodes; Ignition; Iterative closest point algorithm; Light sources; Micromechanical devices; Plasmas;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924563
Filename
6924563
Link To Document