DocumentCode
121334
Title
Design and fabrication of InP free-standing optical waveguides for MEMS
Author
Ng, Wing H. ; Podoliak, Nina ; Stewart, William ; Horak, P. ; Huiyun Liu ; Kenyon, A.J.
Author_Institution
Dept. of Electron. & Electr. Eng., Univ. Coll. London, London, UK
fYear
2014
fDate
17-21 Aug. 2014
Firstpage
181
Lastpage
182
Abstract
We present the design and fabrication of an optical MEMS device on InP platform. The device is based on a suspended parallel waveguide configuration with side pillars supports. Electrodes are integrated on the device layer to provide MEMS actuation functionality to the waveguides. The device is designed to be used as an optical buffer for telecommunication applications.
Keywords
indium compounds; micro-optics; micromechanical devices; optical fabrication; optical waveguides; InP; device layer; electrodes; free-standing optical waveguides; optical MEMS device; optical buffer; telecommunication; Indium phosphide; Micromechanical devices; Optical buffering; Optical device fabrication; Optical waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2014 International Conference on
Conference_Location
Glasgow
ISSN
2160-5033
Print_ISBN
978-0-9928-4140-9
Type
conf
DOI
10.1109/OMN.2014.6924583
Filename
6924583
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