MEMS-based high-Q Fabry-Perot filters

Author

Yu-Sheng Lin ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2014

fDate

17-21 Aug. 2014

Firstpage

115

Lastpage

116

Abstract

The design, fabrication, and characterization of a tunable in-plane MEMS-based Fabry-Perot (FP) filter with hybrid integration of the grating and slot structures are presented. Antireflection grating (ARG) is designed at the inner wall of the FP resonator to enhance the performance of a tunable FP filter. Attributed to the ARG structures, the light can be propagated effectively through the FP resonator. The experimental result shows a low driving voltage electrostatically tuned the device with a wide mechanical tuning range (more than 1600 nm with 4 V) and a high Q-factor (9762).

Keywords

Fabry-Perot resonators; Q-factor; antireflection coatings; diffraction gratings; micro-optics; optical fabrication; optical filters; optical tuning; MEMS-based Fabry-Perot filter; antireflection grating; electrostatic tuning; grating; high Q-factor; hybrid integration; mechanical tuning; slot structures; tunable in-plane Fabry-Perot filter; voltage 4 V; Cavity resonators; Optical fiber devices; Optical fiber filters; Optical resonators; Q-factor; Resonator filters; Fabry-Perot Filter; MEMS; Microoptics;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2014 International Conference on

Conference_Location

Glasgow

ISSN

2160-5033

Print_ISBN

978-0-9928-4140-9

Type

conf

DOI

10.1109/OMN.2014.6924596

Filename

6924596