Optical emission spectroscopy of High Power Impulse Magnetron Sputtering (HiPIMS) of CIGS thin films

Author

Olejnicek, Jiri ; Hubicka, Zdenek ; Kohout, Michal ; Ksirova, Petra ; Brunclikova, Michaela ; Kment, Stepan ; Cada, Michael ; Darveau, Scott A. ; Exstrom, Christopher L.

Author_Institution

Dept. of Low-Temp. Plasma, Inst. of Phys., Prague, Czech Republic

fYear

2014

fDate

8-13 June 2014

Firstpage

1666

Lastpage

1669

Abstract

CuIn_1-xGa_xSe₂ (CIGS) thin films with x = 0, 0.28 and 1 were prepared by the sputtering of Cu, In and Ga in HiPIMS (High Power Impulse Magnetron Sputtering) or DC magnetron and subsequently selenized in an Ar+Se atmosphere. Optical emission spectroscopy (OES) was used to monitor differences in HiPIMS and DC plasma during sputtering of metallic precursors. Thin film characteristics were measured using X-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy, energy-dispersive X-ray spectroscopy (EDX) and other techniques.

Keywords

Raman spectra; X-ray chemical analysis; X-ray diffraction; copper compounds; gallium compounds; indium compounds; photoluminescence; scanning electron microscopy; semiconductor growth; sputter deposition; ternary semiconductors; CIGS thin films; Cu(InGa)Se₂; DC plasma sputtering; EDX; HiPIMS; OES; Raman spectroscopy; SEM; X-ray diffraction; XRD; energy-dispersive X-ray spectroscopy; high power impulse magnetron sputtering; metallic precursors; optical emission spectroscopy; scanning electron microscopy; selenisation; thin film characteristics; Argon; Optical films; Plasmas; Spectroscopy; Sputtering; Stimulated emission; CIGS; HiPIMS; emission spectroscopy; magnetron sputtering; thin films;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialist Conference (PVSC), 2014 IEEE 40th

Conference_Location

Denver, CO

Type

conf

DOI

10.1109/PVSC.2014.6925239

Filename

6925239