• DocumentCode
    122361
  • Title

    Design and modeling of micro-glassblown inverted-wineglass structures

  • Author

    Senkal, Doruk ; Ahamed, Mohammed J. ; Shkel, Andrei M.

  • Author_Institution
    Microsyst. Lab., Univ. of California, Irvine, Irvine, CA, USA
  • fYear
    2014
  • fDate
    25-26 Feb. 2014
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper reports analytical and finite element models for predicting the final 3-D geometry of micro-glassblown inverted-wineglass and hemi-toroidal structures from a set of initial conditions. Using these methods critical geometric param-eters for wineglass resonator and gyroscope operation, such as shell thickness, shell height, stem type (hollow/solid), and stem diameter can be estimated from initial parameters. Analytical models for first order calculation of shell height and minor radius, as well as finite element models based on Arbitrary Lagrangian-Eulerian (ALE) methods for calculating the thickness of the shell and diameter of the stem structure are presented. Developed models were validated against fabricated micro-glassblown structures and showed better than 10 % match to experimental results. Methods presented in this paper can be used to design micro-glassblown wineglass resonators with specific dimensions and resonance frequencies, essentially taking the guesswork out of the design process and significantly lowering the development time.
  • Keywords
    finite element analysis; geometry; gyroscopes; microfabrication; micromechanical resonators; microsensors; 3D geometry prediction; ALE method; arbitrary Lagrangian-Eulerian method; finite element model; gyroscope operation; hemitoroidal structure; microfabrication; microglassblown inverted-wineglass structure; wineglass resonator; Analytical models; Cavity resonators; Fabrication; Finite element analysis; Geometry; Glass; Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Inertial Sensors and Systems (ISISS), 2014 International Symposium on
  • Conference_Location
    Laguna Beach, CA
  • Type

    conf

  • DOI
    10.1109/ISISS.2014.6782501
  • Filename
    6782501