A novel technique for extracting parametric models from MEM resonator test data

This paper reports an innovative test and modeling procedure that is well-suited to high-Q resonators and overcomes several shortcomings of FFT-based approaches. The novel technique uses excitation-response data to generate parametric resonator models in the time-domain. The models possess the following advantages: immunity to parasitic coupling, a spectral resolution that is not limited by record length, and the ability to clearly distinguish nearly degenerate and degenerate modes by using multi-input, multi-output data sets. The parametrization readily yields transfer functions, natural frequencies, time constants and insight into mode shapes.