Deformation-robust gyroscope with 2.0-Hz frequency split variation over temperature range of −50 to 150°c

A micromachined deformation-robust gyroscope with only a 2.0-Hz frequency split variation over the temperature range for automobile applications was developed. Our design, which is a triangularly supported one-sided open frame with three sets of symmetrically arranged folded beams, dissipates and cancels the internal stress of springs caused by deformation. This suppresses the frequency variation between drive mode and sense mode (frequency split) over a wide range of temperatures. Experimental results showed that the proposed gyroscope has only a 2.0-Hz frequency split variation, which brings less than a 1% scale-factor change and an offset change that is 1.5% of the quadrature error.