• DocumentCode
    1225203
  • Title

    Surface-micromachined tunable three-dimensional solid Fabry-Perot etalons with dielectric coatings

  • Author

    Shen, J.L. ; Lin, L.Y. ; Lee, S.S. ; Wu, M.C. ; Sergent, M.

  • Author_Institution
    Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
  • Volume
    31
  • Issue
    25
  • fYear
    1995
  • fDate
    12/7/1995 12:00:00 AM
  • Firstpage
    2172
  • Lastpage
    2173
  • Abstract
    Tunable three-dimensional solid Fabry-Perot etalons with multilayer dielectric coatings have been successfully demonstrated. The out-of-plane etalon is monolithically integrated with a rotation stage using the surface-micromachining technique. A wavelength tuning range of 58.5 nm has been achieved at 1.3 μm wavelength using the on-chip rotation stage
  • Keywords
    Fabry-Perot interferometers; integrated optics; micromachining; optical fabrication; tuning; 1.3 micrometre; dielectric coatings; on-chip rotation stage; out-of-plane etalon; rotation stage; surface-micromachining technique; three-dimensional solid Fabry-Perot etalons; wavelength tuning range;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19951464
  • Filename
    481027
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1225203