DocumentCode
1227757
Title
A Sensitivity Approach to Force Calculation in Electrostatic MEMS Devices
Author
Li, Min ; Kim, Dong-Hun ; Lowther, David A. ; Sykulski, Jan K.
Author_Institution
Dept. of Electr. & Comput. Eng., McGill Univ., Montreal, QC
Volume
44
Issue
6
fYear
2008
fDate
6/1/2008 12:00:00 AM
Firstpage
1610
Lastpage
1613
Abstract
This paper presents a novel method for the computation of force in an electrostatically operated microelectromechanical systems (MEMS) device. The approach is based on continuum design sensitivity analysis (CDSA) and can be used with any analysis system. The method, unlike that of Maxwell stresses, does not require an airgap surrounding the body. The method is applied to the calculation of the tilt angle of a MEMS micromirror, and numerical results are compared with experimental measurements on the real device.
Keywords
electrostatic devices; micromechanical devices; micromirrors; Maxwell stress; continuum design sensitivity analysis; electrostatic MEMS devices; force calculation; micromirror; Continuum design sensitivity analysis (CDSA); force calculation; microelectromechanical system (MEMS) devices;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2007.916380
Filename
4526937
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