DocumentCode
1227958
Title
Surface Acoustic Wave Resonators on Quartz
Author
Tanski, William J.
Volume
26
Issue
2
fYear
1979
fDate
3/1/1979 12:00:00 AM
Firstpage
93
Lastpage
104
Keywords
Acoustic distortion; Acoustic transducers; Acoustic waves; Aluminum; Etching; Fabrication; Resonance; Surface acoustic wave devices; Surface acoustic waves; Ultrasonic transducers;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1979.31073
Filename
1539149
Link To Document