DocumentCode
1228775
Title
A Technique for Eliminating Standing Waves and Other Interference Effects in Photoresist
Author
Lang, Robert J. ; Smilowitz, Bernard
Volume
27
Issue
3
fYear
1980
fDate
5/1/1980 12:00:00 AM
Firstpage
134
Lastpage
136
Keywords
Acoustic waves; Interference elimination; Lithography; Metallization; Optical films; Optical polarization; Optical reflection; Resists; Substrates; Surface acoustic wave devices;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1980.31163
Filename
1539239
Link To Document