DocumentCode

1232803

Title

Scanning Acoustic Microscopy in Electronics Research

Author

Miller, Andrew J.

Volume

32

Issue

2

fYear

1985

fDate

3/1/1985 12:00:00 AM

Firstpage

320

Lastpage

324

Keywords

Acoustic devices; Acoustic imaging; Apertures; Electron microscopy; Frequency; Lenses; Scanning electron microscopy; Surface waves; Switches; Transducers;

fLanguage

English

Journal_Title

Sonics and Ultrasonics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9537

Type

jour

DOI

10.1109/T-SU.1985.31598

Filename

1539674