Modeling and control of a six-axis precision motion control stage

Author

Kuo, Shih-Kang ; Menq, Chia-Hsiang

Author_Institution

Dept. of Mech. Eng., Ohio State Univ., Columbus, OH, USA

Volume

10

Issue

1

fYear

2005

Firstpage

50

Lastpage

59

Abstract

This work presents a newly developed six-axis magnetic suspension stage for precision motion control. The designed travel volume is 4×4×2 mm in translation and 1°×1°×2° in rotation. A dynamic model of the feedback linearized and uncoupled stage is developed for the purpose of motion control. Model parameter variations are demonstrated through closed-loop system identification. In motion control, a parameter variation model is proposed in conjunction with a reduced order observer to compensate the joined effect of disturbance, modeling error, and cross coupling. Experimental results in terms of positioning stability, motion resolution, rotational motion control, model regulation, large travel multiaxis contouring, and disturbance rejection are shown. Uniform positioning stability and invariant dynamic response within the designed travel volume are illustrated.

Keywords

closed loop systems; identification; motion control; reduced order systems; stability; suspensions (mechanical components); closed-loop system identification; disturbance rejection; large travel multiaxis contouring; magnetic suspension stage; model parameter variation; model regulation; motion resolution; positioning stability; reduced order observer; rotational motion control; six-axis precision motion control; Coordinate measuring machines; Error correction; Friction; Magnetic levitation; Mechanical variables measurement; Metrology; Motion control; Piezoelectric actuators; Stability; System identification; Disturbance observer; magnetic suspension system; motion control; system identification;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/TMECH.2004.842219

Filename

1395867