• DocumentCode
    1240018
  • Title

    Preserving the film coefficient as a parameter in the compact thermal model for fast electrothermal simulation

  • Author

    Feng, Lihong H. ; Rudnyi, Evgenii B. ; Korvink, Jan G.

  • Author_Institution
    Inst. for Microsyst. Technol., Univ. of Freiburg, Germany
  • Volume
    24
  • Issue
    12
  • fYear
    2005
  • Firstpage
    1838
  • Lastpage
    1847
  • Abstract
    Compact thermal models are often used during joint electrothermal simulation of microelectromechanical systems (MEMS) and circuits. Formal model reduction allows generation of compact thermal models automatically from high-dimensional finite-element models. Unfortunately, it requires fixing a film coefficient employed to describe the convection boundary conditions. As a result, compact models produced by model reduction do not comply with the requirements of being boundary condition independent. In the present paper, the authors suggest an approach of successive series expansion with respect to the film coefficient as well as to the frequency during model reduction that allows to overcome the problem and keep the film coefficient as a symbolic parameter in the reduced model. The approach is justified with a numerical example of electrothermal simulation of a microthruster unit.
  • Keywords
    finite element analysis; micromechanical devices; reduced order systems; thermal analysis; boundary conditions; compact thermal model; electrothermal simulation; film coefficient; formal model reduction; high dimensional finite element models; microelectromechanical systems; Associate members; Boundary conditions; Circuit simulation; Electrothermal effects; Finite element methods; Frequency; Microelectromechanical systems; Micromechanical devices; Parametric statistics; Reduced order systems; Compact thermal model; model order reduction; parameter-independent reduced model; parametric order reduction;
  • fLanguage
    English
  • Journal_Title
    Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0278-0070
  • Type

    jour

  • DOI
    10.1109/TCAD.2005.852660
  • Filename
    1542239