DocumentCode
1256437
Title
Integrated thin film thermoelectric cooler
Author
Min, Gao ; Rowe, D.M. ; Volklein, F.
Author_Institution
Sch. of Eng., Univ. of Wales Coll. of Cardiff, UK
Volume
34
Issue
2
fYear
1998
fDate
1/22/1998 12:00:00 AM
Firstpage
222
Lastpage
223
Abstract
The possibility of fabricating thermoelectric coolers using thin film deposition and micromachining is investigated. The processing sequences described facilitate fabrication of the thermoelectric cooler and electronic components, such as laser diodes, CCD and infrared detectors, as elements of an integrated circuit. Theoretical calculations based on the proposed thin film thermoelectric cooler indicate that a maximum temperature difference of ~40-50 K can be obtained with a maximum pumping capacity of around a few milliwatts
Keywords
CCD image sensors; Peltier effect; cooling; infrared detectors; micromachining; thermoelectric devices; CCD detectors; infrared detectors; laser diodes; maximum temperature difference; micromachining; processing sequences; pumping capacity; thermoelectric coolers; thin film deposition;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19980148
Filename
653214
Link To Document