DocumentCode
1257767
Title
Guest editorial special issue on the modeling of collisional or near-collisionless low-temperature plasmas
Author
Meyyappan, M. ; Economou, Demetre J. ; Makabe, T.
Volume
27
Issue
5
fYear
1999
Firstpage
1223
Lastpage
1224
Keywords
Chemical engineering; Plasma applications; Plasma chemistry; Plasma diagnostics; Plasma materials processing; Plasma sheaths; Plasma simulation; Plasma sources; Plasma transport processes; Semiconductor process modeling;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.1999.799797
Filename
799797
Link To Document