Extension of the nonlocal approach to evaluate the electron velocity distribution

Author

Schmidt, Martin ; Uhrlandt, Dirk ; Winkler, Rolf

Author_Institution

Inst. of Nonisothermal Plasmaphys., Greifswald, Germany

Volume

27

Issue

5

fYear

1999

fDate

10/1/1999 12:00:00 AM

Firstpage

1271

Lastpage

1278

Abstract

The method of the nonlocal approach is used to describe the spatially dependent electron kinetics in an inert gas dc column plasma taking into account the space charge confinement. The historical concept of the method, the applied simplification of the electron kinetic equation, and the specifications about its validity are critically discussed. The accuracy of the results are evaluated by means of detailed comparisons with a strict solution of the relevant kinetic equation based on the two-term approximation. An extension of the method is deduced to estimate the anisotropic part of the electron velocity distribution which allows an approximate description of the electron particle and power fluxes. These estimations are used for a consistent treatment of the spatially resolved electron power balance in the column plasma

Keywords

inert gases; plasma kinetic theory; plasma transport processes; approximate description; column plasma; electron kinetic equation; electron particle; electron velocity distribution; inert gas dc column plasma; nonlocal approach; power flux; space charge confinement; spatially dependent electron kinetics; spatially resolved electron power balance; two-term approximation; Anisotropic magnetoresistance; Differential equations; Electrons; Integral equations; Kinetic theory; Plasma confinement; Plasma materials processing; Plasma sources; Space charge; Spatial resolution;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.799803

Filename

799803