DocumentCode
1261341
Title
Low-temperature polysilicon TFT with counter-doped lateral body terminal
Author
Lee, Min-Cheol ; Juhn-Suk Yoo ; Han, Min-Koo
Author_Institution
Sch. of Electr. Eng. (50), Seoul Nat. Univ., South Korea
Volume
38
Issue
5
fYear
2002
fDate
2/28/2002 12:00:00 AM
Firstpage
255
Lastpage
256
Abstract
A low-temperature polysilicon thick film transistor (TFT) employing a counter-doped lateral body terminal (LBT) is proposed and fabricated to suppress the kink current and to enhance the stability of polysilicon in the TFT. In the experiment, the LBT effectively reduced the kink effect by collecting the counter-polarity carriers
Keywords
elemental semiconductors; silicon; thin film transistors; Si; counter-doped lateral body terminal; kink current; low-temperature polysilicon thin film transistor; stability;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20020152
Filename
990229
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