DocumentCode
1265029
Title
Electron Heating in Dual-Radio-Frequency-Driven Atmospheric-Pressure Plasmas
Author
O´Neill, C. ; Waskoenig, J. ; Gans, T.
Author_Institution
Centre for Plasma Phys., Queens Univ. Belfast, Belfast, UK
Volume
39
Issue
11
fYear
2011
Firstpage
2588
Lastpage
2589
Abstract
Dual-frequency operation of radio-frequency-driven atmospheric-pressure plasmas offers enhanced control over power coupling and ionization mechanisms. Nonlinear frequency coupling in the plasma boundary sheath governs the dynamics of plasma ionization and associated mode transitions. Variations of the voltage ratios allow us to manipulate the temporal and spatial structures of plasma ionization.
Keywords
ionisation; plasma diagnostics; plasma heating; plasma nonlinear processes; plasma sheaths; dual-radio-frequency-driven atmospheric-pressure plasma; electron heating; mode transitions; nonlinear frequency coupling; plasma boundary sheath; plasma ionization; power coupling; pressure 1 atm; spatial structure; temporal structure; voltage ratio; Atmospheric-pressure plasmas; Couplings; Frequency control; Gallium nitride; Helium; Ionization; Atmospheric pressure plasmas; plasma sheaths; plasma simulation;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2011.2153882
Filename
5940235
Link To Document