Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

Author

Wang, L.-P. ; Deng, K. ; Zou, L. ; Wolf, R. ; Davis, R.J. ; Trolier-McKinstry, S.

Author_Institution

Pennsylvania State Univ., University Park, PA, USA

Volume

23

Issue

4

fYear

2002

fDate

4/1/2002 12:00:00 AM

Firstpage

182

Lastpage

184

Abstract

MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.

Keywords

accelerometers; diaphragms; frequency response; lead compounds; micromachining; micromechanical resonators; microsensors; piezoelectric thin films; piezoelectric transducers; thermal stability; 35.3 to 3.7 kHz; 5.6 micron; DRIE bulk-micromachining; MEMS accelerometers; PZT; PZT thick films; PbZrO3TiO3; annular diaphragm sensing structures; broad usable frequency range; dynamic frequency response; inertial sensing structure; low transverse sensitivity; numerical models; one axis sensitivity; piezoelectric films; resonant frequencies; temperature stability; Accelerometers; Frequency; Microelectromechanical systems; Micromechanical devices; Numerical models; Stability; Temperature sensors; Testing; Thick films; Titanium compounds;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/55.992832

Filename

992832