• DocumentCode
    1272378
  • Title

    Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers

  • Author

    Yoo, H.-J. ; Hayes, J.R. ; Paek, E.G. ; Harbison, J.P. ; Florez, L.T. ; Kwon, Y.S.

  • Author_Institution
    Bellcore, Red Bank, NJ, USA
  • Volume
    26
  • Issue
    23
  • fYear
    1990
  • Firstpage
    1944
  • Lastpage
    1946
  • Abstract
    The fabrication and characterisation of two-dimensional phase-locked arrays of vertical cavity surface emitting lasers is reported. The three two-dimensional array structures characterised were a 2*3 periodic array of 10 mu m2 lasers, a hexagonal array and a centred hexagonal array of 5 mu m hexagonal lasers. All arrays were fabricated using the same technique which was a combination of mesa etching and oxygen implantation isolation.
  • Keywords
    III-V semiconductors; aluminium compounds; distributed Bragg reflector lasers; gallium arsenide; ion implantation; semiconductor laser arrays; sputter etching; Al 0.5Ga 0.5As; AlGaAs-GaAs; In 0.2Ga 0.8As; centred hexagonal array; hexagonal array; hexagonal lasers; implant isolated vertical cavity surface emitting lasers; mesa etching; oxygen implantation isolation; two-dimensional phase-locked arrays;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19901258
  • Filename
    59537
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1272378