Experimental Studies of Hysteresis in MEMS Accelerometers: A Commentary

Author

Luczak, Sergiusz

Author_Institution

Div. of Design of Precision Devices, Warsaw Univ. of Technol., Warsaw, Poland

Volume

15

Issue

6

fYear

2015

fDate

Jun-15

Firstpage

3492

Lastpage

3499

Abstract

This paper is a commentary on determining hysteresis of MEMS accelerometers, with references to publication Nonlinear Regression Model of a Low-g MEMS Accelerometer by Ang et al. It proves that the originally reported values of the errors due to hysteresis of MEMS accelerometers were over evaluated, and the observed phenomenon resulted from inadequate method of testing and application of unfit instrumentation. Appropriate precise test rig with manual drive is proposed and results of measurements realized by means of it are presented, proving insignificant influence of the hysteresis. Range of application of the used equipment is discussed, paying a careful attention to properties of the mechanical instrumentation employed. Few other related issues of lesser importance are also addressed.

Keywords

accelerometers; hysteresis; micromechanical devices; regression analysis; experimental study; low-g MEMS accelerometer hysteresis; manual drive; mechanical instrumentation; nonlinear regression model; test rig method; Acceleration; Accelerometers; Accuracy; Hysteresis; Instruments; Micromechanical devices; Vibrations; Accelerometer; MEMS; experimental studies; hysteresis; test rig;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2015.2390778

Filename

7006645