DocumentCode
1280559
Title
Guest editorial special section on microelectronic test structures
Author
Hazama, Hirofumi
Author_Institution
Toshiba Corporation Semiconductor Company
Volume
15
Issue
2
fYear
2002
fDate
5/1/2002 12:00:00 AM
Firstpage
194
Lastpage
194
Keywords
CMOS technology; Circuit testing; Manufacturing processes; Material properties; Materials testing; Microelectronics; Nonvolatile memory; Parameter extraction; Process design; Very large scale integration;
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2002.999591
Filename
999591
Link To Document