DocumentCode
1284369
Title
2010 IEEE International Electron Devices Meeting (IEDM)
Volume
23
Issue
3
fYear
2010
Firstpage
490
Lastpage
490
Abstract
Prospective authors are requested to submit new, unpublished manuscripts for inclusion in the upcoming event described in this call for papers.
fLanguage
English
Journal_Title
Semiconductor Manufacturing, IEEE Transactions on
Publisher
ieee
ISSN
0894-6507
Type
jour
DOI
10.1109/TSM.2010.2060670
Filename
5536918
Link To Document