DocumentCode
1287287
Title
A new SrBi4Ti4O15/CaBi4Ti4O15 thin-film capacitor for excellent electric stability
Author
Noda, Minoru ; Nomura, Shuhei ; Uchida, Hiroshi ; Yamashita, Kaoru ; Funakubo, Horoshi
Author_Institution
Grad. Sch. of Sci. & Technol., Kyoto Inst. of Technol., Kyoto, Japan
Volume
59
Issue
9
fYear
2012
fDate
9/1/2012 12:00:00 AM
Firstpage
1888
Lastpage
1893
Abstract
SrBi4Ti4O15 (SBTi) and CaBi4Ti4O15 (CBTi) dielectric films of bismuth layered-structure dielectrics (BLSD) are prepared on Pt(100) film for constructing stacked-type dielectric capacitors; it is observed that they are c-axis single-oriented crystalline films. Compared with the perovskite barium titanate family of (Ba,Sr)TiO3 (BST), it is observed that the SBTi film keeps a low leakage of 10-7 A/cm2 at 250 kV/ cm, which is smaller by an order of magnitude than the BST film, even with thinner SBTi film. The temperature coefficient of capacitance (TCC) of the SBTi or CBTi film is about 100 to 250 ppm/K and is much smaller than that of the perovskite BST film. Because the SBTi and CBTi films have opposite polarities of TCC in this experiment, they are expected to cancel out the temperature dependence in the SBTi/CBTi composite capacitor. These results indicate that the BLSD films of SBTi and CBTi are effective for application in high-temperature and high-permittivity capacitors with the practical barium perovskite oxide family.
Keywords
barium compounds; bismuth compounds; calcium compounds; platinum; strontium compounds; thin film capacitors; (BaSr)TiO3; CBTi dielectric films; Pt; Pt(100) film; SBTi dielectric films; SBTi/CBTi composite capacitor; SrBi4Ti4O15-CaBi4Ti4O15; bismuth layered-structure dielectrics; c-axis single-oriented crystalline films; electric stability; perovskite barium titanate; stacked-type dielectric capacitors; temperature coefficient of capacitance; thin-film capacitor; Capacitance; Capacitors; Crystals; Electric fields; Films; Permittivity; Temperature dependence;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2012.2402
Filename
6306004
Link To Document