• DocumentCode
    1287722
  • Title

    Multiferroic Bi 0.7Dy/ 0.3 FeO3 films as high k dielectric material for advanced non-volatile memory devices

  • Author

    Prashanthi, K. ; Duttagupta, S.P. ; Pinto, R. ; Palkar, V.R.

  • Author_Institution
    Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
  • Volume
    45
  • Issue
    16
  • fYear
    2009
  • Firstpage
    821
  • Lastpage
    822
  • Abstract
    Gate dielectric materials having high dielectric constant, low interface state density and good thermal stability are needed for advanced CMOS applications. In this letter, the electrical properties of novel multiferroic Bi0.7Dy0.3FeO3 (BDFO) thin films deposited using the pulsed laser deposition technique on p-type (100) silicon substrate are reported. Using high frequency capacitance-voltage (C-V) measurements, the dielectric constant, effective oxide charge density and interface state density were estimated. The results suggest the potential application of multiferroic BDFO films as gate dielectric material for novel memory devices that can be electrically written and magnetically read.
  • Keywords
    CMOS integrated circuits; bismuth compounds; dysprosium compounds; high-k dielectric thin films; multiferroics; permittivity; pulsed laser deposition; random-access storage; silicon; thermal stability; Bi0.7Dy0.3FeO3; advanced CMOS applications; capacitance-voltage measurements; dielectric constant; electrical properties; high k dielectric material; multiferroic thin films; nonvolatile memory devices; oxide charge density; p-type silicon substrate; pulsed laser deposition; thermal stability;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2009.0712
  • Filename
    5191338