DocumentCode
1287722
Title
Multiferroic Bi 0.7Dy/ 0.3 FeO3 films as high k dielectric material for advanced non-volatile memory devices
Author
Prashanthi, K. ; Duttagupta, S.P. ; Pinto, R. ; Palkar, V.R.
Author_Institution
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
Volume
45
Issue
16
fYear
2009
Firstpage
821
Lastpage
822
Abstract
Gate dielectric materials having high dielectric constant, low interface state density and good thermal stability are needed for advanced CMOS applications. In this letter, the electrical properties of novel multiferroic Bi0.7Dy0.3FeO3 (BDFO) thin films deposited using the pulsed laser deposition technique on p-type (100) silicon substrate are reported. Using high frequency capacitance-voltage (C-V) measurements, the dielectric constant, effective oxide charge density and interface state density were estimated. The results suggest the potential application of multiferroic BDFO films as gate dielectric material for novel memory devices that can be electrically written and magnetically read.
Keywords
CMOS integrated circuits; bismuth compounds; dysprosium compounds; high-k dielectric thin films; multiferroics; permittivity; pulsed laser deposition; random-access storage; silicon; thermal stability; Bi0.7Dy0.3FeO3; advanced CMOS applications; capacitance-voltage measurements; dielectric constant; electrical properties; high k dielectric material; multiferroic thin films; nonvolatile memory devices; oxide charge density; p-type silicon substrate; pulsed laser deposition; thermal stability;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el.2009.0712
Filename
5191338
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