Electromigration induced resistance increase in open TSVs

Through silicon vias are the components in three-dimensional integrated circuits, which are responsible for the vertical connection inside the dies. In this work we present studies about the reliability of open through silicon vias against electromigration. A two-step approach is followed. In the first step the stress development of a void free structure is analyzed by means of simulation to find the locations, where voids due to stress are most probably nucleated. In the second step, voids are placed in the through silicon vias and their evolution is traced including the increase of resistance. The resistance raises more than linearly in time and shows an abrupt open circuit failure. Simulations were carried out for different currents and fitted to Black´s equation. These results are in good agreement with results of time accelerated electromigration tests.