Surface Raman spectroscopy as an in-situ probe of laser micro chemical processes

Laser-induced chemical processes are now being used in a number of new semiconductor processing techniques. The authors briefly review the technique known as laser microchemistry (or laser direct writing) and describe a device that may be used both as an instrument for laser direct writing and to provide diagnostic information via surface Raman scattering. They include examples from their recent work on deposition of silver from various precursors.