DocumentCode
1294974
Title
A digital profiler for the characterization of semiconductors
Author
Massé, Daniel J. ; Matsinger, Barbara ; Matsinger, John
Author_Institution
Res. Div., Raytheon Co., Waltham, MA, USA
Issue
1
fYear
1981
fDate
3/1/1981 12:00:00 AM
Firstpage
15
Lastpage
19
Abstract
Describes an automatic digital profiler which measures the density of free carriers versus depth in a semiconductor material. The instrument is controlled by a microprocessor in order to reduce operator intervention and eliminate some of the errors inherent in analog systems.
Keywords
carrier density; digital instrumentation; doping profiles; semiconductor device testing; digital profiler; doping profile; free carrier density measurement; semiconductor characterization; Capacitance; Capacitance measurement; Materials; Schottky diodes; Semiconductor device measurement; Voltage measurement;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/TIM.1981.6312431
Filename
6312431
Link To Document