DocumentCode
1295459
Title
Electromigration noise measurements using a novel AC/DC wafer-level noise measurement system
Author
Yassine, Abdullah M. ; Chen, Charles Tsong-Ming
Author_Institution
Dept. of Electr. Eng., Univ. of South Florida, Tampa, FL, USA
Volume
44
Issue
1
fYear
1997
fDate
1/1/1997 12:00:00 AM
Firstpage
180
Lastpage
184
Abstract
This paper presents a novel AC/DC noise measurement system. This system simultaneously uses a high DC current to generate 1/f2 noise (electromigration noise) in thin films and a low AC current to detect that noise. This new system allows us to separate the noise components of metal thin films and is more stable and sensitive than its predecessors
Keywords
1/f noise; bridge instruments; electric noise measurement; electromigration; integrated circuit measurement; integrated circuit metallisation; integrated circuit testing; metallic thin films; 1/f2 noise; AC/DC wafer-level noise measurement system; electromigration noise measurements; high DC current; low AC current; metal thin films; Background noise; Battery charge measurement; Circuit noise; Current measurement; Electrical resistance measurement; Electromigration; Noise generators; Noise measurement; Power measurement; Semiconductor device noise;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.554808
Filename
554808
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