Fabrication and characteristics of inversion layer LiNbO3 for high frequency ultrasound transducers

This paper studied the relationship between the ratio of LiNbO₃ inversion layer plate and its thickness, annealing time, temperature. Two groups of Y-36°LiNbO₃ plate with different thickness between 100 to 500μmand 60 to 200μm were annealed at 1130°C and 1140°C respectively with different time. The inversion layer ratio of the inversion layer ratio of these Y-36° LiNbO₃ inverted plates was measured and compared. It is found that it is easier to get a higher inversion layer ratio for a thinner LiNbO₃ plate or at a higher annealing temperature, such as 1140°C.