Dual Rayleigh and Love surface acoustic wave structures based on ZnO thin film for microfluidic applications

Based on a ZnO/Quartz AT structure, our microfluidic system is able, on the same substrate, to interact efficiently with a microdroplet in order to mix the solution and to detect a modification of its physical properties. The sensitivity of the device is not disturbed by the mixing one due to the choice of two different acoustic waves, Rayleigh wave and Love wave. The Love wave is generated through the use of a thin ZnO layer as a guiding layer. Moreover with respect of a well determined ZnO thickness, the temperature coefficient of frequency has been reduced and in the same time the mass sensitivity has been enhanced. We have now to demonstrate the efficiency of our dual Rayleigh and Love surface acoustic wave structure based on ZnO thin film with the well-known biomolecular binding systems such as biotin- streptavidin and deoxyribonucleic acid (DNA) hybridization for testing cell immobilization and removal.