• DocumentCode
    1299131
  • Title

    Electron microscope scans area a fraction of the size of a pinhead

  • Volume
    82
  • Issue
    12
  • fYear
    1963
  • Firstpage
    738
  • Lastpage
    738
  • Abstract
    Scientists at the Westinghouse Research Laboratories, Pittsburgh, Pa., can now map, in the finest detail, areas no larger than 0.001 square inch in size on the surface of tiny electronic devices, by means of a scanning electron microscope.
  • fLanguage
    English
  • Journal_Title
    Electrical Engineering
  • Publisher
    ieee
  • ISSN
    0095-9197
  • Type

    jour

  • DOI
    10.1109/EE.1963.6541821
  • Filename
    6541821
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1299131