• DocumentCode
    1300575
  • Title

    Total reflection mirrors fabricated on silica waveguides with focused ion beam

  • Author

    Watanabe, K. ; Schrauwen, J. ; Leinse, Arne ; Thourhout, D.V. ; Heideman, Rene ; Baets, Roel

  • Author_Institution
    Photonics Res. Group, Ghent Univ.-IMEC, Ghent, Belgium
  • Volume
    45
  • Issue
    17
  • fYear
    2009
  • Firstpage
    883
  • Lastpage
    884
  • Abstract
    Efficient total reflection mirrors are fabricated on silica-based waveguides by direct milling with a focused ion beam. To reduce the excess losses of the mirrors, a two-step milling technique is employed that reduces the roughness of the mirror surface while maintaining a high milling rate. A focused ion beam is used to fabricate low-loss mirrors with small excess losses of about 1.0 dB.
  • Keywords
    focused ion beam technology; milling; mirrors; optical waveguides; silicon compounds; surface roughness; SiO2; direct milling; focused ion beam; mirror surface roughness; silica waveguides; total reflection mirrors;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2009.0473
  • Filename
    5207530
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1300575