DocumentCode
1301251
Title
Effects of F- ions and F2 molecules on the oscillation process of a discharge-pumped ArF excimer laser
Author
Nagai, Shinji ; Sakai, Masahiro ; Furuhashi, Hideo ; Kono, Akihiro ; Goto, Toshio ; Uchida, Yoshiyuki
Author_Institution
Dept. of Quantum Eng., Nagoya Univ., Japan
Volume
34
Issue
1
fYear
1998
fDate
1/1/1998 12:00:00 AM
Firstpage
40
Lastpage
46
Abstract
Time-resolved number densities of the fluorine negative ion in a discharge-pumped ArF excimer laser are measured by a dye laser absorption method. The peak density of F- is 0.93 ×10 15 cm-3 at a total gas pressure of 2.5 atm, a gas mixture ratio of F2-Ar-He=0.2-10.0-89.8, and a charging voltage of 28 kV for a 68-nF storage capacitor bank. The dependences of the peak F- density and the ArF laser output power on the F 2 gas fraction in F2-Ar-He mixture are investigated. The effects of F- ions and F2 molecules on the ArF laser oscillation process are discussed by considering the F2 mixture-ratio dependences of particle densities, laser output power, mean electron energy, and laser power extraction efficiency. With increasing F2 mixing ratio, the ArF* excimer formation first increases as F- increases, but in F2-rich conditions the laser power decreases because of the laser photon absorption due to F- ions and quenching of ArF* with F2 molecules
Keywords
argon compounds; excimer lasers; ion density; laser beams; laser variables measurement; oscillations; radiation quenching; 193.2 nm; 2.5 atm; 28 kV; 68 nF; ArF; ArF excimer laser; ArF* excimer formation; F; F2; F2 gas fraction; F2 molecules; F2-Ar-He; F2-rich conditions; F- ions; charging voltage; discharge-pumped laser; dye laser absorption method; gas mixture ratio; laser oscillation process; laser output power; laser photon absorption; laser power; laser power extraction efficiency; mean electron energy; mixing ratio; mixture-ratio dependences; oscillation process; particle densities; peak density; quenching; storage capacitor bank; time-resolved number densities; total gas pressure; Capacitors; Chemical lasers; Density measurement; Electrons; Gas lasers; Laser excitation; Laser modes; Plasma measurements; Power generation; Power lasers;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/3.655005
Filename
655005
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