Investigation on Strain-Sensing Suspended Single-Walled Carbon Nanotube Arrays

Author

Zheng, Fu-Zhong ; Zhou, Zhao-Ying ; Yang, Xing ; Tang, Yi-Ke ; Wu, Ying

Author_Institution

Coll. of Mech. Eng., Chongqing Univ., Chongqing, China

Volume

10

Issue

4

fYear

2011

fDate

7/1/2011 12:00:00 AM

Firstpage

694

Lastpage

698

Abstract

An electromechanical system is constructed to explore the electrical properties of well-aligned horizontal suspended single-walled carbon nanotube (SWCNT) arrays under the influence of tensile stretching. The suspended SWCNT array sensing structure consists of a well-grown SWCNT array suspended between two separated metal electrodes on top of a silicon (Si) wafer with 500-nm-thick thermal oxide layer. Sensor properties are explored in linear region, including sensitivity (gauge factor ~248), linearity (better than 99%), and hysteresis. Results show that the suspended SWCNT array devices have potential application as strain gauges due to their high sensitivity.

Keywords

carbon nanotubes; nanosensors; strain sensors; C; Si; electrical properties; electromechanical system; horizontal suspended single-walled carbon nanotube arrays; sensor properties; silicon wafer; size 500 nm; strain gauges; strain-sensing; tensile stretching; thermal oxide layer; well-aligned single-walled carbon nanotube arrays; Carbon nanotubes; Electrodes; Force; Photonic band gap; Silicon; Strain; Substrates; Band gap; carbon-nanotube (CNT) array; gauge factor (GF); hysteresis; linearity;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2010.2068559

Filename

5557821