• DocumentCode
    1306757
  • Title

    More on SOI

  • Author

    Weaver, Harry T.

  • Volume
    3
  • Issue
    6
  • fYear
    1987
  • Firstpage
    3
  • Lastpage
    3
  • Abstract
    This is the second of two issues on the subject of silicon-on-insulator (SOI) devices. Our collection of articles includes a third material technique (oxidation of porous silicon), design considerations for SOI, and some potential and existing applications. A total of 12 articles from four countries make up these two issues, and we received some 23 responses advertising activity in the SOI area. I would like to express my appreciation to each of these authors for their contributions, which have provided us with an excellent perspective on SOI materials and devices.
  • fLanguage
    English
  • Journal_Title
    Circuits and Devices Magazine, IEEE
  • Publisher
    ieee
  • ISSN
    8755-3996
  • Type

    jour

  • DOI
    10.1109/MCD.1987.6323171
  • Filename
    6323171