• DocumentCode
    1307817
  • Title

    Experimental validation of an accelerated method of oxide-trap-level characterization for predicting long term thermal effects in metal oxide semiconductor devices

  • Author

    Saigné, F. ; Dusseau, L. ; Fesquet, J. ; Gasiot, J. ; Ecoffet, R. ; David, J.P. ; Schrimpf, R.D. ; Galloway, K.F.

  • Author_Institution
    Centre d´´Electron., Univ. des Sci. et Tech. du Languedoc, Montpellier, France
  • Volume
    44
  • Issue
    6
  • fYear
    1997
  • fDate
    12/1/1997 12:00:00 AM
  • Firstpage
    2001
  • Lastpage
    2006
  • Abstract
    A new method for accelerated prediction of the long-term thermal annealing of bulk oxide trapped charge in the low dose rate space environment was presented in a previous paper. This method, based on the thermal detrapping characteristics is briefly reviewed. From a single experimental isochronal curve, the long term isothermal behavior of the device is predicted and compared with an experimental isothermal curve. Four different devices, obtained from four different manufacturers, were examined to demonstrate the validity of this method. In all four cases, the predicted long-term thermal behavior is in good agreement with experimental results. This method´s application is discussed for space missions
  • Keywords
    MIS devices; annealing; electron traps; accelerated method; bulk oxide trapped charge; isochronal annealing; isothermal annealing; long-term thermal annealing; low dose rate space environment; metal oxide semiconductor device; oxide trap level; thermal detrapping; Acceleration; Annealing; Electron traps; Isothermal processes; Lead compounds; Prediction methods; Semiconductor devices; Space charge; Space missions; Temperature;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/23.658981
  • Filename
    658981