Beam focusing characteristics of silicon microtips with an in-plane lens

Author

Py, Christophe ; Itoh, Junji ; Hirano, Takayuki ; Kanemaru, Seigo

Author_Institution

Nat. Res. Council of Canada, Ottawa, Ont., Canada

Volume

44

Issue

3

fYear

1997

fDate

3/1/1997 12:00:00 AM

Firstpage

498

Lastpage

502

Abstract

Single microtips, 2×2 and 10×10 arrays of microtips surrounded by an integrated focusing ring, were fabricated and their focusing characteristics experimentally investigated. Observation of the beam on a phosphor screen shows that the focusing is very effective for single microtips and 2×2 arrays; moreover, the reduction in emitted current is much smaller than for double-gate focusing. 10×10 arrays of microtips, however, do not generate very focused beams. These results agree well with simulations. The possibility of simultaneous focusing and deflecting is also discussed, and a new structure combining the advantages of double-gate and surrounding ring focusing is suggested

Keywords

electron beam focusing; electron optics; elemental semiconductors; silicon; vacuum microelectronics; FEDs; Si; beam focusing characteristics; deflecting; electron optics; emitted current; field emission microtips; in-plane lens; integrated focusing ring; surrounding ring focusing; Anodes; Electrodes; Electron emission; Fabrication; Laboratories; Laser excitation; Lenses; Phosphors; Silicon; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/16.556161

Filename

556161